ISO INTERNATIONAL STANDARD 18516 Second edition 2019-01 Surface chemical analysis Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres Analysechimiquedes surfaces-Determinationde larésolution laterale et de la netteté pardesmethodes a basede faisceauutilisant unegammeallantdesnanometresauxmicrometres Reference number IS0 18516:2019(E) os1 @ IS0 2019 IS0 18516:2019(E) COPYRIGHTPROTECTEDDOCUMENT IS02019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting below or ISo's member body in the country of the requester. ISO copyright office CP 401: Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +4122 749 0111 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2019 - All rights reserved IS0 18516:2019(E) Contents Page Foreword Introduction ..vi 1 Scope. ..1 2 Normative references ..1 3 Terms and definitions ..1 Symbols and abbreviated terms ..3 4 5 General information .4 5.1 Background .4 5.2 Survey on principal methods to characterize lateral resolution in imaging surface chemical analysis .5 .6 5.3 Measurement of lateral resolution in imaging surface chemical analysis 5.4 Dependence of lateral resolution on scan direction. 5.5 Reporting results.. 6 Measurement of lateral resolution using the straight edge method .8 8 6.1 Introduction 6.2 Modelfunctions and sharpness parameters 9 6.3 Requirementsforatest sample. 6.4 Cleaning the straight-edge specimen .10 6.5 Mounting the straight-edge specimen 10 6.6 Operating the instrument. .10 6.7 Data acquisition requirements.. 10 6.8 Determination of D12-88... 11 6.9 Determination of linespread function 11 6.10 Reporting. .11 7 Measurement of lateral resolution using the narrow line method .13 7.1 Introduction 13 7.2 Requirements foratestsample ..13 7.3 Cleaning the narrow stripe specimen ..13 7.4 Mountingthe narrow stripe specimen 14 7.5 Operating the instrument .14 7.6 Data acquisition requirements. .14 7.7 Determination of wLSF. .14 7.8 Reporting. 15 8 Measurement of lateral resolution using the grating method .17 8.1 .17 Introduction 8.2 Requirements foratest sample 17 8.3 Cleaning the grating specimen 19 8.4 Mounting the grating specimen. 19 8.5 Operating the instrument. 20 8.6 Data acquisition. 20 8.7 Estimationof effectivelateral resolution reby visual inspection of an image or a linescan 20 8.8 Determination of effective lateral resolution re by numerical analysis of a line profile. .23 8.8.1 23 General 8.8.2 Consideration of noise and determination of reduced noise oNr 23 8.8.3 Determination of dipD .24 8.8.4 Resolution criterion 25 8.9 Determination of the effective lateral resolution re using graded gratings 26 8.9.1 Estimation of effective lateral resolution reby using theresolution criterion in Formula (17) 26 @IS0 2019- All rights reserved iii